How Mass Flow Meters and Flow Controllers Work

Thermal gas mass flow meters are flow meters designed based on the principle of thermal diffusion. That is to say, when the fluid flows through the heating object, the heat dissipation of the heating object is proportional to the flow rate of the fluid. The sensor of this series of flowmeters has two standard RTDs, one is used as a heat source and the other is used to measure the fluid temperature. When the fluid flows, the temperature difference between the two is linearly related to the flow rate, and then Through microelectronic control technology, this relationship is converted into a linear output of the measured flow signal. How to distinguish between thermal gas mass flow controllers and mass flow meters?

 

 

The thermal gas mass flow controller is composed of a flow sensor, a diverter channel, a flow regulating valve and an amplifier controller. The gas flow sensor uses the principle of capillary heat transfer thermocalorimetry to measure the mass flow of gas (without temperature and pressure compensation). The flow signal measured by the sensor heating bridge is sent to the amplifier for amplification, the amplified flow detection voltage is compared with the set voltage, and then the difference signal is amplified to control the regulating valve, and the closed-loop control of the flow through the channel makes it match the The set flow is equal. The diverter determines the flow of the main channel. The flow display instrument matched with the mass flow controller is equipped with a regulated power supply, a digital voltmeter, a setting potentiometer, peripherals, built-in conversion and three-position valve-controlled switches. Automatic online proportional dilution device SSGM







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